Harbin Institute of Technology 150001 Li Wenzhuo Zhao Wansheng Shengli Petroleum School 257000 Yu Yunxia External manufacturers and research institutes have been commoditized and are working on several constituent features of the micro-EDM machine tool. Technical highlights and typical applications are expected to work for the levy. The developer of a fine EDM machine tool provides valuable information.
There are two major current technologies in the international market for manufacturing equipment for micro-electro-mechanical systems. These are silicon planar process technologies derived from semiconductor manufacturing processes. This technique is suitable for integrating microsensor microactuators and micro-information processors in small cells, which is very suitable for mass production; 3 types are derived from conventional additive technologies including special additive technologies; plus 1 technologies, which are typical The generation technology can process all kinds of complex dimensional surfaces that can be added to Siping blood processing technology, and can process metal materials and various kinds of difficult-to-machine materials. It is especially suitable for the processing of small and medium-quantity parts. Many developed countries adopt the same strategy. In order to give full play to their respective advantages as an important branch of MEMS manufacturing technology, the development of new EDM micro-discharge machine tools has received widespread attention. Currently, some of the micro-EDM machines in developed countries have entered the industrial application and commercial sales stage. , such as Japan's Panasonic Seiki Swiss Midea core, Williams and other companies have more mature products, of which a wood pine 1 fine machine Optimal product performance. The product can stably process only a small hole of 1 and replaces the forefront of this field, but its price is very expensive, about 200,000 US dollars, and is listed as an embargoed product to China. In addition, the systems or devices developed by Masao Sangmo and other scholars of Toyota University of Technology at the University of Tokyo in Nagasawa, Japan are also at a very high level. The main domestic research on micro EDM in this research direction is mainly Combined with the actual production needs, focus on micro-hole processing. For example, the squib nozzle electric spark small hole processing and so on mostly did not enter the industrial application and commercial sales stage. In this respect, Nanjing University of Aeronautics and Astronautics started earlier, research, and also more systematic. For the first time, micro holes 4 with a hole diameter of only 1 less than 1 and a depth-to-diameter ratio of 31 were machined; at Zhanhua University, a micro-EDM machine tool using a creeping micro-feed mechanism was developed. Processing out of the drive 3! In the process of realizing modernization of our country's industry, the development of a micro-electric spark plus machine with independent intellectual property rights as soon as possible has become the top priority for me and the micro-manufacturing industry. The characteristics of micro-EDM processing and the requirement for small parts are small. The low rigidity makes it difficult to process with traditional processing methods. In EDM, the macroscopic force between the electrode and the workpiece is very small, in the range of several hundred millinewtons to several tens millinewtons, if matched with precision. Servo feed mechanism and micro-discharge power supply, EDM is very suitable for micro-add 1 micro-EDM technology can ensure that the parts add a tip, but also has a higher processing efficiency, which is other processing methods such as ultrasound The incomparable processing and other advancements improve the machining accuracy of parts. Similar to the machining center, the precision multi-functional micro EDM machine tool receives the green. From this micro-electrode manufacturing to the micro parts, this multi-functional electric spark plus 1 machine tool is used. In the process, the electrodes need only to be clamped, which can reduce the installation errors caused by the multiple-grip electrodes, and can be corrected by reworking the electrodes. The system error of the machine tool and the shape error of the lost electrode, thereby improving the machining accuracy of the part, can also realize the functions of electric spark wire electrode grinding, EDM complicated shape micro-hole machining and Tuen spark milling machining and so on. Multi-axis linkage technology. It is possible to realize complex micro-electric sparks and improve the positioning of micro-components due to difficulty in repositioning of micro-parts. It is also possible to perform electro-mechanical electroforming processing or even micro-cutting on-line micro-electromechanical systems for on-line measurement, assembly, and debugging according to work requirements. In the body, which constitutes a flexible manufacturing center of a micro-electromechanical system The following describes several typical micro-electric spark plus four-bed composition of technical features and additional examples. Japan's Panasonic fine machine production is a high precision micro-EDM The machine tool 6 is also the most accurate micro-EDM machine in the current commercial sales. The actual photos of the machine tool, such as the Institute of Special Processing at the Institute of Technology, Irvine University of Technology, have also developed a variety of electrode direct elements in two parts.
The machine is equipped with a microscope for easy viewing of micro-machined conditions.
In addition, a wire grinding unit is also available. The line electrode grinding machine is a machining unit consisting of a machining head that can move in two directions and a table that can move in one direction and direction. The performance index 1 clothing; 82 recognized the main processing unit performance index 700825 spindle motor 1 motor without encoder disk weight 18 to find by the bearing V ceramic bearing processing box size mml42 special stroke range 2001 dozen stroke range 50n yiifL microscope scope sensor terror Processing Plant Master Unit 0 Control Unit 2 Geely Pine 082 Machine Internals 182 Your Tuning Spark Discharge Power Supply Uses 0 Micro Energy Relaxation Power Supply The minimum pulse energy is 0 to 00 which is the power of conventional EDM machining power. Reduce the effect of parasitic capacitance on the process. The main part of the machine tool for the mining of ceramics in the machine tool can be used for EDM drilling, milling, grinding, wire grinding, and other EDM machining. It can stably process 13 micro-shafts and 1 dozen holes. Dare to reach, and 1 private 1 such as microporous and micro-slit photos. The machine tool can be used for the machining of various micro-axis curved surface cavities, and is suitable for the development and production of micro-electromechanical systems such as micro-accelerometer micro force sensor micro nozzles!
Scanning-type micro-EDM machine tool developed by the Wu 3 people of the new type of micro-electric fire machine processing machine photo by degrees and high stiffness and other characteristics, used here as a micro-EDM terminal lifter. Make it scan motion.
The old five-stroke machine tool is composed of several 16 scanning machine tools. The machine tool is intended for machining of the machine tool. The 8 is a micro-cross slot and a circular groove machined with this machine. The micro-EDM electrode has 3 degrees of freedom, ie, 7 directions. 2 tilting movements and 1 movement along 2 directions, with various forms and various degrees of freedom of the workstation. All kinds of complicated micro-curved surfaces can be machined. The machine spindle consists of a tamping plate and a tightening bar and three tamping devices. Creep loading between the substrate and the platform. And points, still associated with it. By adjusting the length of the raking device, the two-way movement and sense of the platform can be achieved. 7 to the tilt. The feed back movement of the electrode is the expansion and contraction of the three peristaltic devices and the size of the whole seven axes is 1821 and 228. The response frequency of the 6th platform is determined by the piezoelectric ceramic. Can reach 200.
The position error is less than 3 less than 1 and 0.04!
Multifunctional Micro Electric Discharge Machining Center Technology Personnel Production Technology Research Center Kedding 6,0 In the implementation of Susan Miller, 1 2000 axis cutting machine tool is improved on the basis of the overall difference with the developed countries Still great, especially in the industrialization of technology. Therefore, in the face of market demand, Chinese scientists and technicians should focus on in-depth study of the market-adapted technology and agriculture, and accelerate the pace of industrial applications of micro-EDM processing, targeted deep research into micro-EDM technology and micro Micro-electromechanical micro-medical devices, micro-actuators, micro-electro-mechanics, micro-electro-mechanical systems, and other micro-electromechanical systems are applied to the applications of micro-sensors. It is becoming a driving force for the development of productivity. The rationale is to install a reversible spindle head on the upper guide wire head of an inline cutting machine and mount a micro wire electrode grinding device on the work table of the machine tool. A rotary device is also installed on the clamping system of the workpiece to process a variety of complex shapes. The machining center can realize micro-cutting of micro-wires 10 Examples of micro-cutting machining micro-cavity machining Micro-wire electrode grinding Micro-EDM drilling and cutting The customer's type of micro-electric spark plus, because of the many functions of this plus center, it is very suitable for processing a variety of complex profiles 10 is the processing center in a thick sheet processing tooth thickness 5 cut 1 micro-tooth structure is processed out Examples of various micro-structures.
There are two major current technologies in the international market for manufacturing equipment for micro-electro-mechanical systems. These are silicon planar process technologies derived from semiconductor manufacturing processes. This technique is suitable for integrating microsensor microactuators and micro-information processors in small cells, which is very suitable for mass production; 3 types are derived from conventional additive technologies including special additive technologies; plus 1 technologies, which are typical The generation technology can process all kinds of complex dimensional surfaces that can be added to Siping blood processing technology, and can process metal materials and various kinds of difficult-to-machine materials. It is especially suitable for the processing of small and medium-quantity parts. Many developed countries adopt the same strategy. In order to give full play to their respective advantages as an important branch of MEMS manufacturing technology, the development of new EDM micro-discharge machine tools has received widespread attention. Currently, some of the micro-EDM machines in developed countries have entered the industrial application and commercial sales stage. , such as Japan's Panasonic Seiki Swiss Midea core, Williams and other companies have more mature products, of which a wood pine 1 fine machine Optimal product performance. The product can stably process only a small hole of 1 and replaces the forefront of this field, but its price is very expensive, about 200,000 US dollars, and is listed as an embargoed product to China. In addition, the systems or devices developed by Masao Sangmo and other scholars of Toyota University of Technology at the University of Tokyo in Nagasawa, Japan are also at a very high level. The main domestic research on micro EDM in this research direction is mainly Combined with the actual production needs, focus on micro-hole processing. For example, the squib nozzle electric spark small hole processing and so on mostly did not enter the industrial application and commercial sales stage. In this respect, Nanjing University of Aeronautics and Astronautics started earlier, research, and also more systematic. For the first time, micro holes 4 with a hole diameter of only 1 less than 1 and a depth-to-diameter ratio of 31 were machined; at Zhanhua University, a micro-EDM machine tool using a creeping micro-feed mechanism was developed. Processing out of the drive 3! In the process of realizing modernization of our country's industry, the development of a micro-electric spark plus machine with independent intellectual property rights as soon as possible has become the top priority for me and the micro-manufacturing industry. The characteristics of micro-EDM processing and the requirement for small parts are small. The low rigidity makes it difficult to process with traditional processing methods. In EDM, the macroscopic force between the electrode and the workpiece is very small, in the range of several hundred millinewtons to several tens millinewtons, if matched with precision. Servo feed mechanism and micro-discharge power supply, EDM is very suitable for micro-add 1 micro-EDM technology can ensure that the parts add a tip, but also has a higher processing efficiency, which is other processing methods such as ultrasound The incomparable processing and other advancements improve the machining accuracy of parts. Similar to the machining center, the precision multi-functional micro EDM machine tool receives the green. From this micro-electrode manufacturing to the micro parts, this multi-functional electric spark plus 1 machine tool is used. In the process, the electrodes need only to be clamped, which can reduce the installation errors caused by the multiple-grip electrodes, and can be corrected by reworking the electrodes. The system error of the machine tool and the shape error of the lost electrode, thereby improving the machining accuracy of the part, can also realize the functions of electric spark wire electrode grinding, EDM complicated shape micro-hole machining and Tuen spark milling machining and so on. Multi-axis linkage technology. It is possible to realize complex micro-electric sparks and improve the positioning of micro-components due to difficulty in repositioning of micro-parts. It is also possible to perform electro-mechanical electroforming processing or even micro-cutting on-line micro-electromechanical systems for on-line measurement, assembly, and debugging according to work requirements. In the body, which constitutes a flexible manufacturing center of a micro-electromechanical system The following describes several typical micro-electric spark plus four-bed composition of technical features and additional examples. Japan's Panasonic fine machine production is a high precision micro-EDM The machine tool 6 is also the most accurate micro-EDM machine in the current commercial sales. The actual photos of the machine tool, such as the Institute of Special Processing at the Institute of Technology, Irvine University of Technology, have also developed a variety of electrode direct elements in two parts.
The machine is equipped with a microscope for easy viewing of micro-machined conditions.
In addition, a wire grinding unit is also available. The line electrode grinding machine is a machining unit consisting of a machining head that can move in two directions and a table that can move in one direction and direction. The performance index 1 clothing; 82 recognized the main processing unit performance index 700825 spindle motor 1 motor without encoder disk weight 18 to find by the bearing V ceramic bearing processing box size mml42 special stroke range 2001 dozen stroke range 50n yiifL microscope scope sensor terror Processing Plant Master Unit 0 Control Unit 2 Geely Pine 082 Machine Internals 182 Your Tuning Spark Discharge Power Supply Uses 0 Micro Energy Relaxation Power Supply The minimum pulse energy is 0 to 00 which is the power of conventional EDM machining power. Reduce the effect of parasitic capacitance on the process. The main part of the machine tool for the mining of ceramics in the machine tool can be used for EDM drilling, milling, grinding, wire grinding, and other EDM machining. It can stably process 13 micro-shafts and 1 dozen holes. Dare to reach, and 1 private 1 such as microporous and micro-slit photos. The machine tool can be used for the machining of various micro-axis curved surface cavities, and is suitable for the development and production of micro-electromechanical systems such as micro-accelerometer micro force sensor micro nozzles!
Scanning-type micro-EDM machine tool developed by the Wu 3 people of the new type of micro-electric fire machine processing machine photo by degrees and high stiffness and other characteristics, used here as a micro-EDM terminal lifter. Make it scan motion.
The old five-stroke machine tool is composed of several 16 scanning machine tools. The machine tool is intended for machining of the machine tool. The 8 is a micro-cross slot and a circular groove machined with this machine. The micro-EDM electrode has 3 degrees of freedom, ie, 7 directions. 2 tilting movements and 1 movement along 2 directions, with various forms and various degrees of freedom of the workstation. All kinds of complicated micro-curved surfaces can be machined. The machine spindle consists of a tamping plate and a tightening bar and three tamping devices. Creep loading between the substrate and the platform. And points, still associated with it. By adjusting the length of the raking device, the two-way movement and sense of the platform can be achieved. 7 to the tilt. The feed back movement of the electrode is the expansion and contraction of the three peristaltic devices and the size of the whole seven axes is 1821 and 228. The response frequency of the 6th platform is determined by the piezoelectric ceramic. Can reach 200.
The position error is less than 3 less than 1 and 0.04!
Multifunctional Micro Electric Discharge Machining Center Technology Personnel Production Technology Research Center Kedding 6,0 In the implementation of Susan Miller, 1 2000 axis cutting machine tool is improved on the basis of the overall difference with the developed countries Still great, especially in the industrialization of technology. Therefore, in the face of market demand, Chinese scientists and technicians should focus on in-depth study of the market-adapted technology and agriculture, and accelerate the pace of industrial applications of micro-EDM processing, targeted deep research into micro-EDM technology and micro Micro-electromechanical micro-medical devices, micro-actuators, micro-electro-mechanics, micro-electro-mechanical systems, and other micro-electromechanical systems are applied to the applications of micro-sensors. It is becoming a driving force for the development of productivity. The rationale is to install a reversible spindle head on the upper guide wire head of an inline cutting machine and mount a micro wire electrode grinding device on the work table of the machine tool. A rotary device is also installed on the clamping system of the workpiece to process a variety of complex shapes. The machining center can realize micro-cutting of micro-wires 10 Examples of micro-cutting machining micro-cavity machining Micro-wire electrode grinding Micro-EDM drilling and cutting The customer's type of micro-electric spark plus, because of the many functions of this plus center, it is very suitable for processing a variety of complex profiles 10 is the processing center in a thick sheet processing tooth thickness 5 cut 1 micro-tooth structure is processed out Examples of various micro-structures.
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