Software Design of Intelligent Quartz Crystal Vacuum Gauge Qi Bensheng, Wang Huaping, Ling Mingfang (Department of Information and Electronic Engineering, Zhejiang University, Hangzhou 310027, Zhejiang, China). The V/F-converted output signal fp and quartz-crystal resonant frequency fc collected by a single-chip microcomputer are collected and filtered by software, and a combination of timed interruption and external pulse count interruption is used to improve the accuracy of the acquisition. Through a large number of monotonicity due to the /cT relationship, the ZT relationship can be transformed into a Z/c relationship to consider setting AZ' as an additional shift due to the shift of the temperature of the crystal impedance due to the temperature at different temperatures, thus having hingfe. Qi Bensheng, et al.: Intelligence. Quartz crystal vacuum gauge software design a total of 6 bytes. Among them, ID is a multi-frame identification word, the program is set to A5H; GAS is a gas type, including air oxygen, chlorine, argon, etc.; TEMPR is temperature data, by /,. Converted; DHDL is the high and low 8-bit data of fp respectively; SUM is the check sum, which is obtained by accumulating the first 5 bytes. It is used to determine whether the data has errors in the transmission process.
4 Experimental results In order to determine the accuracy of the quartz crystal vacuum gauge, a 2D quartz vacuum gauge and a condenser vacuum gauge manufactured by MKS, USA were connected to the same vacuum test system for comparative test. The condenser vacuum gauge manufactured by MKS is used as a standard gauge and its measurement error is in the entire measuring range. Predictive control. Beijing: National Defense Industry Press, 1993.
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